advanced lithography中文什么意思

例句与用法

1. before more advanced lithography tool is produced, in order to use current tools to manufacture vdsm ic, reticle correction methods such as perturbing the shape ( via optical proximity correction ( opc ) ) or the phase ( via phase-shifting masks ( psm ) ) of transmitting aperture in the reticle are proposed by the industry
   在波长更小的光刻系统出现前，为了能利用现有设备解决集成电路的可制造性问题，工业界提出了对掩模作预失真(光学邻近校正)和在掩模上加相位转移模(移相掩模)等的掩模校正方法。